264, Naehyangan-gil, Jeongnam-myeon, Hwaseong-si, Gyeonggi-do, Republic of Korea
Repair of Service
Repair of Service
‧ AMAT Loadlock Indexer Overhaul
- Replace all consumable parts.
– All bearing (OPM New), Lead screw (OPM New)
– Dynamic seal (OPM New) - Leak check.
- Indexer moving cycle test.
AMAT 200mm Endura & Centura PVD is the main product, leading the industry’s used equipment based on differentiated technology and know-how, and supplying the best products.
‧ Generator
– MDX Series, CPS1001S, LF10A, HFV8000, CX600S, PDX 900-2V, E-Chuck P/S
‧ DC Power Supply
– Granville phillips Ion Gauge, 15 & 24 DC P/S, REMOTE 15 DC P/S
‧ Pump
– CTI OB8F Cryo-pump, Dry-pump(Ebara, Edwards), Leybold Turbo-pump & Controller
‧ RF Matcher
– Preclean, Bias, Coil
Repair Inquiry
Maintenance and Management Services
264, Naehyangan-gil, Jeongnam-myeon, Hwaseong-si, Gyeonggi-do, Republic of Korea (18523)