264, Naehyangan-gil, Jeongnam-myeon, Hwaseong-si, Gyeonggi-do, Republic of Korea
Centura PVD
Centura PVD of Product
AMAT 200mm Endura & Centura PVD is the main product, leading the industry’s used equipment based on differentiated technology and know-how, and supplying the best products.
Centura PVD
Centura PVD equipment is a type of chemical vapor deposition (CVD) equipment used in the manufacturing of semiconductor devices. CVD is a process that uses high-temperature gases to deposit a desired thin film. Centura PVD equipment supports a variety of CVD processes, including electron-beam deposition (EB-PVD), plasma deposition (PVD), and thermal deposition (CVD).
Centura PVD Classification
Source material type : Classified by the element to be deposited. Includes metals, oxides, and compounds.
Deposition process : Classified by the deposition process. Includes electron-beam deposition, plasma deposition, and thermal deposition.
Chamber size : Classified by the size of the film to be deposited. Includes small, medium, and large.
Production volume : Classified by the amount of film produced. Includes low, medium, and high.
Centura PVD Component
Chamber : The space where the film is deposited. The chamber must be maintained in a vacuum state and be able to control temperature, pressure, and gas composition.
Source material : Supplies the element to be deposited. Can be supplied using an electron beam, plasma, or heat.
Heater : Heats the chamber to perform the deposition process. The chamber can be heated using a variety of methods, including a heating coil, induction, or microwaves.
Control system : Controls the process. Controls temperature, pressure, and gas composition.
Centura PVD Main functions
Deposition of films : Deposits the desired element to form a film.
Control of film quality : Controls the thickness, density, and composition of the film to form the desired quality of film.
Optimization of the manufacturing
process of films : Optimizes the deposition process conditions to efficiently manufacture the desired film.
Maintenance and Management Services
264, Naehyangan-gil, Jeongnam-myeon, Hwaseong-si, Gyeonggi-do, Republic of Korea (18523)